Variable Gain Motion Control of Wafer Scanners
نویسندگان
چکیده
منابع مشابه
Wafer Stage Motion Control
Wafer manufacturing Industries uses conventional controller, but in order to control the position in sub nanometer range conventional controller is not suitable, why because Tuning and augmenting the controller becomes difficult and expensive. So a robust controller is designed for wafer manufacturing system. The controller design in this paper is performed for the translational x and y DOFs in...
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ژورنال
عنوان ژورنال: IEEJ Journal of Industry Applications
سال: 2016
ISSN: 2187-1094,2187-1108
DOI: 10.1541/ieejjia.5.90